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Ultra-High Purity TEE Block Diaphragm Valves
Utilises all SPDS parts and advantages of the No.l diaphragm valve for semiconductor applications,combined with the lowest dead space within any UHP valve on the market.
Key Features
Available in linesizes up to 6"main/1"branch
Metal-to-metal external seals
Minimal dead space
Standard & bespoke multiport/block options
Typical Applications
Lateral inline points-of-connection (POC), ultra-high-purity gas control for point-of-use service, zero dead space bulk gas tee-of, UHP gas sampling, and critical application containment functionality.
Key Specifications
| Materials of Construction | Cleanliness | Specifications | Options |
| 316L stainless body | Manufactured in Class 10 Cleanroom | Leak tested using Mass spectrometer -1x10(-9) mbar/l/s | Manual or pneumatic, LOTO failsafe configurations |
| Elgiloy Diaphragm | Zero particles @0.1μm | <10Ra micro-inch surface roughness | PFA / PI seat high temperature (up to 150C) |
| Barstock-only source | <10ppb O₂/H₂O outgassing | Vacuum and pressure tested 100% production control | Multiple block orientations and configurations (DPV etc) |
| PCTFE standard seat (minimal volume) | Cleaned using 18.2MΩ-cm DI water | Manual 375 p.s.i.Pneumatic 250 p.s.i. | 2.5 - 9.0 Cv (flow coefficient) |
Order Information
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