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Product Applications
The Carten P-Mega forged diaphragm valve are intended fortool hook up and tool install applicationsin Semiconductor and PV/Solar applications where standard products are utilised and costefficiencies required. As part of the Fujikin Group(FCG), Carten have utilised the manufacturingflows and changing secondary materials to reduce the total production costs.
The P-Mega valve can utilised for:
Tool Hook Up
Tool Installation
Gas Sticks and Purge Sticks
Standardised Valve Applications
Cost Efficient Gas Supply Applications
Standard Valves in Valve Manifold Box (VMB) and Valve ManifoldPanels (VMP).
Suitable for Inert Process Gases
Material of Construction
P-Mega Series Technical Specifications
| Maximum Operating Pressure | P-Mega Series | Vacuum to 145 PSIG (0~10BAR; 1MPa) for Pneumatic Vacuum to 290 PSIG (0~20BAR; 2MPa) for Manual See below for pneumatic actuation pressures |
| Maximum Operating Temperature | PCTFE | +14°F (-10°C) to +176°F (+80°C) |
| Cycle Life & Durability | 5,000 cycles for manual valves 1,000,000 cycles for pneumatic valves | |
| Helium Leak Test | Inboard | 1 x 10⁻⁹ scc/s He (1 x 10⁻¹⁰ Pa M³/s) |
| Across the Seat | 1 x 10⁻⁹ scc/s He (1 x 10⁻¹⁰ Pa M³/s) | |
| Outboard Pressure Test | 1 x 10⁻⁶ scc/s He (1 x 10⁻⁷ Pa M³/s) | |
| Cleanliness and Packaging | All valves are cleanroom assembled and 100% tested in a ISO Class IV (class 10) cleanroom environment | |
| Standard Finish | 0.25µm (10Ra EP) internal on the wetted area | |
P-Mega Valve Part Numbering
Standard P-Mega Models and Descriptions
| Model | Description | Cv Value | Actuation Pressure |
| C-FVPDF-R244LC-EC1/02 | 6.35mm (¼") pneumatically operated normally closed (NC) diaphragm valve with UJR Male connections inlet and outlet | 0.30 | 58~87PSIG (4~6BAR) |
| C-FVPDF-R244LC-EC2/02 | 6.35mm (¼") pneumatically operated normally closed (NC) diaphragm valve with UJR Female connections inlet and outlet | 0.30 | 58~87PSIG (4~6BAR) |
| C-FVPDF-R144LC-EM1GB/02 | 6.35mm (¼") manual multi-turn operated diaphragm valve with UJR Male connections inlet and outlet | 0.30 | N/A [Manual Valve] |
| C-FVPDF-R144LC-EM2GB/02 | 6.35mm (¼") manual multi-turn operated diaphragm valve with UJR Female connections inlet and outlet | 0.30 | N/A [Manual Valve] |
| C-FVPDF-R266LC-EC1/02 | 9.52mm (⅜") pneumatically operated normally closed (NC) diaphragm valve with UJR Male connections inlet and outlet | 0.65 | 58~87PSIG (4~6BAR) |
| C-FVPDF-R266LC-EM2GB/02 | 9.52mm (⅜") pneumatically operated normally closed (NC) diaphragm valve with UJR Female connections inlet and outlet | 0.65 | 58~87PSIG (4~6BAR) |
| C-FVPDF-R166LC-EM1GB/02 | 9.52mm (⅜") manual multi-turn operated diaphragm valve with UJR Male connections inlet and outlet | 0.65 | N/A [Manual Valve] |
| C-FVPDF-R166LC-EM2GB/02 | 9.52mm (⅜") manual multi-turn operated diaphragm valve with UJR Female connections inlet and outlet | 0.65 | N/A [Manual Valve] |
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